Silicon Nitride polished with CMP techniques
400X (DIC) as polished |
Silicon Nitride polished by conventional 9,6,3,1,0.25 um diamond steps. Note that the damage is not removed even after long polishing times. 400X (DIC) as polished |
CAUTION:Safety is very important when etching. Be sure to wear the appropriate protective clothing and observe all WARNINGS on chemical manufacuters SDS (Safety Data Sheets). Also review the COMMENTS and CONDITIONS Section for each etchant.