| 120 grit SiC paper* 240 grit SiC paper*
 
 | Water | 5-10 lbs | 200/200 rpm | Planar 1 min
 
 |  |  | 
      
        | 360 grit SiC paper 600 grit SiC paper
 
 | Water | 5-10 lbs | 200/200 rpm | 1 min 1 min
 |  |  | 
      
        | 9 um DIAMAT diamond on POLYPAD polishing pad
 | DIALUBE Purple Extender
 | 5 lbs | 200/200 rpm | 3 min |  |  | 
            
        | 6 um DIAMAT diamond on TEXPAN polishing pad
 | DIALUBE Purple Extender
 | 5 lbs | 200/200 rpm | 3 min |  |  | 
                  
        | 1 um DIAMAT diamond on GOLDPAD polishing pad
 | DIALUBE Purple Extender
 | 5-10 lbs | 200/200 rpm | 2 min |  |  | 
      
        | 0.05 um Nanometer alumina on NAPPAD polishing pad
 |  | 5-10 lbs | 200/200 rpm | 30 sec |  |  |